Design, fabrication, and characterization of piezoelectric single crystal stack actuators based on PMN-PT

초록

A piezoelectric stack actuator (PSA) consisting of 28 lead magnesium niobate-lead titanate (PMN-PT) piezoelectric single crystal layers is developed. The free stroke and blocking force, which are the figures of merit of a PSA, are simulated through finite element analysis. The free stroke of the PSA samples measured using a laser displacement sensor was in the range of 6.4-8.0 mu m at 200 V. In addition, the blocking force of the PSA samples measured using a custom-made system, consisting of a strain gauge, a motor and a load cell, was in the range of 191-226 N at 200 V. An analysis of seven samples exhibited that a large free stroke resulted in a blocking force of the PSA.

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