Resistance Controls of Carbon Black-Polyethylene Oxide (CB-PEO) Gas Sensor Using the Diode Laser (408 nm) Trimming Process

초록

In this study, we performed laser trimming in the depth direction of a carbon black-polyethylene oxide (CB-PEO) gas sensor using a laser diode with a wavelength of 408 nm. The CB-PEO gas sensor was formed on a patterned soda-lime glass substrate (electrode spacing of 10 mm) using a drop-casting technique. The resistance of the CB-PEO sensor can be adjusted from several kΩ to approx-imately 1000 kΩ using a laser-trimming process. The resistance control mechanism can be explained as follows. The PEO polymer decomposes into a volatile gas form, causing the CB located in the polymer matrix to agglomerate. During the laser process, the CB combines with atmospheric oxygen and is released as carbon dioxide or carbon monoxide. This loss of CB appeared to be the main factor contributing to the increase in resistance. This approach not only aids in circuit design but also simplifies the algorithms by allow-ing the precise resistance control of the sensors. © 2024, Korean Sensors Society. All rights reserved.

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