Impact of Sulfur Passivation on Carrier Transport Properties of In0.7Ga0.3As Quantum-Well MOSFETs

초록

We investigated the impact of a sulfur passivation (S-passivation) process step on carrier transport properties of surface-channel In0.7Ga0.3As quantum-well (QW) Metal-Oxide-Semiconductor Field-Effect-Transistors (MOSFETs) with source/drain (S/D) regrowth contacts. To do so, we fabricated long-channel In0.7Ga0.3As QW MOSFETs with and without (NH4)(2)S treatment prior to a deposition of Al2O3 /HfO2 = 1-nm/3-nm by atomic-layer-deposition (ALD). The devices with S-passivation exhibited a lower value of subthreshold-swing (S) = 74 mV/decade and more positive shift in the threshold voltage (V-T) than those without S-passivation. From the perspective of carrier transport, S-passivated devices displayed excellent effective mobility (mu(eff)) in excess of 6,300 cm(2)/V.s at 300 K. It turned out that the improvement of mu(eff )was attributed to reduced Coulombic and surface-roughness scatterings. Using a conductance method, a fairly small value of interface trap density (D-it) = 1.56 x 10(12) cm(-2) eV(-1) was obtained for the devices with S-passivation, which was effective in mitigating the Coulombic scattering at the interface between the high-k dielectric layer and the In0.7Ga0.3As As surface-channel layer.

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