Fabrication and Evaluation of the MXene-Based Wearable Sensor

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초록

Herein, we propose a simple fabrication method for MXene-coated V-groove sensors for applications. To enhance the sensitivity of this sensor, we applied MXene particles, instead of conventional metal layers, as a sensing material on the sensor's surface. This allows for an easier fabrication, as well as higher sensitivity of the sensor compared to those of our previously demonstrated metal-based V-groove sensor. Additionally, polyurethane-acrylate, a UV-curable liquid polymer, can be easily applied using micro-electromechanical systems-based surface-texture micromachining. The sensor sensitivity is approximately 0.08 /mm, and it can be improved by increasing the number of V-grooves. We believe that the proposed MXene-based wearable sensor offers a great potential in detecting various types of motions characteristic of human activities. © 2023, Korean Sensors Society. All rights reserved.

키워드

Crack sensor; MXene; Semiconductor Fabrication; Strain sensors
제목
Fabrication and Evaluation of the MXene-Based Wearable Sensor
저자
Yoon, Youngsam; Lee, Hojin; Cha, Goeun; Kim, Taewook; Park, Jongsung
DOI
10.46670/JSST.2023.32.5.295
발행일
2023
유형
Article
저널명
센서학회지
권
32
호
5
페이지
295 ~ 299