Properties of ITO films deposited on paper sheets using a low-frequency (60 Hz) DC-pulsed magnetron sputtering method

초록

Indium tin oxide (ITO) films were deposited on paper sheets using a low-frequency (60 Hz) DC-pulsed magnetron sputtering (LF-DPMS) with a modified sputtering gun. The deposited ITO films exhibited a cubic structure with a grain size of 20.5 nm. The work function of the films was 4.94 eV, and the surface was highly hydrophobic with a contact angle of 116?. The transmittance at a wavelength of 550 nm was 86.6% and the optical bandgap was 3.33 eV. The resistivity and the sheet resistance were 8.08 ? 10-3 ?cm and 40.4 ?/?. By the end of the deposition process, the fabric structure of the paper sheet remained in good condition, and the as-deposited paper sheet did not bend due to the residual stress of ITO films. From these results, LF-DPMS is considered a damagefree deposition technique, and is rather effective for film depositions on weak substrates including papers, polymers, and fibers.

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