이산화탄소 감지를 위한 4.26 µm 필터용 poly Si/SiO2 다층 박막 기반의 패브리 페로-필터

초록

In this study, the relationship between the transmitted light intensity and full-width-at-half-maximum (FWHM) of a Fabry–Perot filter was investigated. The measured refractive indices and absorption coefficients of the fabricated thin films were applied to the Fabry–Perot filter via simulations using optical software. Although considerable research has been conducted on Fabry–Perot filters, this study focused on the usefulness of 4.26-µm infrared filtering in carbon dioxide detection. Optical analysis was performed considering the effects of the thickness, refractive indices, and number of thin films in a distributed Bragg reflector. Ultimately, a clear trade-off relationship was observed wherein the transmitted light intensity decreased as the number of multilayers increased; however, the FWHM was observed to be narrower.

키워드