IMPROVEMENT IN CHEMIRESISTIVE RESPONSE OF SnO2 THIN FILM BY RuO2-NANOSHEETS-FUNCTIONALIZATION AND ITS APPLICATION TO HIGHLY SENSITIVE ETHANOL SENSOR

초록

This paper introduces the use of ruthenium dioxide (RuO2) nanosheets as a catalyst in gas sensors, significantly enhancing the chemiresistive response of tin dioxide (SnO2) thin films for ethanol detection. The RuO2-functionalized device, integrated with a microheater for low-power operation, demonstrates a 243% improved response to 10 ppm ethanol compared to that of pristine SnO2. The sensor is operable at 250 degrees C with 18 mW power and fabricated with bulk-micromachining, thus these could be suitable for portable applications. Additionally, the sensor's performance at exposure to ethanol at various concentrations down to 500 ppb is characterized.

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