Phase evolution and densification behavior during reaction sintering of multi-component oxides: A case study of the In2O3-SnO2-ZnO ternary system

초록

This study investigates the reaction sintering behavior and phase development in the indium tin zinc oxide (ITZO) system with varying compositions (In:Sn:Zn atomic ratios of 4.4:1.2:4.4, 5.5:0.8:3.7, 7.6:0.8:1.6, and 9.0:0.3:0.7). The phase evolution during heating was monitored using high-temperature X-ray diffraction, while densification behavior was analyzed through thermomechanical analysis. Results revealed that multiple phases, including ZnO, SnO2, Zn(2-x)Sn(1-x)In2xO4 (ZTIO), and indium zinc oxide (IZO), coexist during the reaction sintering process, with their relative amounts varying with temperature and composition. The presence of intermediate and second phases significantly influenced the densification behavior, as increased intermediate phase volume leads to additional hetero-phase interfaces, impeding the densification process. Compositions with higher intermediate and secondary phase content showed delayed densification and lower final density, attributed to the increased fraction of hetero-phase contacts in lower In2O3 content compositions. This study provides insights into the relationship between phase development and densification behavior in multi-component oxide systems during reaction sintering.

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