A depthwise convolutional neural network model based on active contour for multi-defect wafer map pattern classification

초록

As semiconductor manufacturing processes continue to witness increased integration density and design complexity, semiconductor wafers are experiencing a growing diversity and complexity of defects. While previous research in wafer map classification using deep learning has made significant advancements in dealing with single defect patterns, the classification of mixed-type defects has received less attention due to their considerably higher difficulty level compared to single defects. This research addresses this critical gap, emphasizing the need for improved methods to classify mixed-type defects, which are more complex and challenging. To tackle this challenge, this paper introduces the active contour-based lightweight depthwise network (AC-LDN) model for the classification of multi-defect wafer map patterns. Initially, multi-defect features are extracted using an active contour-based segmentation model. Subsequently, the learning model employs a depthwise convolutional neural network (CNN) architecture that combines separable CNN and dilated CNN techniques. This unique approach optimizes the model in the separable segment while effectively addressing defect complexity in the depthwise segments. Consequently, AC-LDN outperforms other state-of-the-art models, offering a balance between lightweight characteristics and high accuracy. The proposed method demonstrates its superiority over previous models when evaluated on the extsdsensive multi-wafer map dataset, achieving an average classification accuracy exceeding 98% and a confusion matrix coefficient surpassing 0.97.

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