Displacement Damage Effects Induced by Proton Irradiation in β-Ga2O3 Schottky Barrier Diodes

  • Kim, Young Jo; 
  • Kwon, Tae Seong; 
  • Woo, Sung Yun; 
  • Yoon, Young Jun; 
  • Seo, Jae Hwa
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초록

In this study, vertical beta-Ga2O3 SBDs were fabricated and tested for radiation hardness under proton irradiation. Displacement damage led to degradation in current and capacitance, while the breakdown voltage increased due to higher resistance.

제목
Displacement Damage Effects Induced by Proton Irradiation in β-Ga2O3 Schottky Barrier Diodes
저자
Kim, Young Jo; Kwon, Tae Seong; Woo, Sung Yun; Yoon, Young Jun; Seo, Jae Hwa
DOI
10.23919/SNW65111.2025.11097240
발행일
2025
유형
Proceedings Paper
저널명
2025 SILICON NANOELECTRONICS WORKSHOP, SNW
페이지
98 ~ 99